📄 IJAERD-OJS-1274
Simulation of Static mode and Dynamic mode of microcantilever Structures
| Author(s) | : | Manjula Sahu |
| Institution | : | Electrical Department, RCOEM |
| Published In | : | Vol. 3, Issue 3 — March 2016 |
| Page No. | : | 126-129 |
| Domain | : | Engineering |
| Type | : | Research Paper |
| ISSN (Online) | : | 2348-4470 |
| ISSN (Print) | : | 2348-6406 |
Abstract
This Microcantilevers are the most simplified MEMS (Micro-electo mechanical systems) based devices.Diverse applications of microcantilevers in the field of sensors have been explored by many researchers. This paperpresents the simulation of microcantilever and observed sensitivity for static mode of deflection and dynamic mode ofdeflections. Simulations of microcantilever made up of single crystal silicon and gold as sensing layer using FEM (finiteelement method) with COMSOL Multiphysics was done.
🕮 How to Cite
Manjula Sahu, “Simulation of Static mode and Dynamic mode of microcantilever Structures”, International Journal of Advance Engineering and Research Development (IJAERD), Vol. 3, Issue 3, pp. 126-129, March 2016.
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