Simulation of Static mode and Dynamic mode of microcantilever Structures

Abstract

This Microcantilevers are the most simplified MEMS (Micro-electo mechanical systems) based devices.
Diverse applications of microcantilevers in the field of sensors have been explored by many researchers. This paper
presents the simulation of microcantilever and observed sensitivity for static mode of deflection and dynamic mode of
deflections. Simulations of microcantilever made up of single crystal silicon and gold as sensing layer using FEM (finite
element method) with COMSOL Multiphysics was done.